A major semiconductor manufacture‘s advanced manufacturing line project in ShangHai
We’ve designed, manufactured, installed a Inorganic gas treatment system composed by 29 sets of large scrubber treatment units for the owner in 2018. And all system composed by 3 of Subsystem which is AEX(Acid gas) CEX (Alkaline gas )DEX（Acid gas containing silicon powder）, The main function of them is to treat the gas properly and guarantee the gas emission to be meet the trade standard of semiconductor. The system has high automatic extent, large discharge capacity(MAX unit discharge 89000m3/H) and great treatment ability(MAX up to 95%). Many kinds of our star products such as VO circulation pump, RFT-OA turbo fan, FSW scrubber, Venturi device have applied to this project. This is the greatest project that we’ve been completed in china till now.
